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ECS Transactions [AAPM 25th Symposium on Microelectronics Technology and Devices - Sao Paulo, Brazil (September 6 - September 9, 2010)] - Analog Performance of SOI nFinFETs with Different TiN Gate Electrode Thickness
Galeti, Milene, Rodrigues, Michele, Collaert, Nadine, Simoen, Eddy, Claeys, Cor, Martino, João A., Pavanello, M., Claeys, C., Martino, J.Année:
2010
Langue:
english
DOI:
10.1149/1.3474142
Fichier:
PDF, 202 KB
english, 2010