Influence of flow ratio of N2 to (N2+Ar) mixture on the structure and properties of zirconium nitride films prepared by radio frequency magnetron sputtering
Sui, Yingrui, Liu, Jiukai, Liu, Bo, Wang, Lihong, Yao, B.Volume:
24
Langue:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.2009.0383
Date:
October, 2009
Fichier:
PDF, 572 KB
english, 2009