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[ECS 213th ECS Meeting - Phoenix, AZ (May 18 - May 23, 2008)] ECS Transactions - Enhancement in Thermal Stability of Metal-Insulator-Metal Capacitors for Deep Trench DRAM Application
Hsieh, Chun-I, Pan, Tung-Ming, Huang, Tsai-Yu, Liang, Wen-Ping, Lin, Jian-Chyi, Wu, Chang-Rong, Shih, StevenVolume:
13
Année:
2008
Langue:
english
DOI:
10.1149/1.2908642
Fichier:
PDF, 371 KB
english, 2008