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Effect of Different High-K Dielectrics on the Pt Nanocrystal Formation Statistics (size, density and area coverage) for Flash Memory Application
Misra, Abhishek, Sadana, Sunny, Suresh, Satya, Bhaisare, Meenakshi, Srinivasan, Senthil, Waikar, Mayur, Gaur, Amit, Kottantharayil, AnilVolume:
1288
Langue:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2011.208
Date:
January, 2011
Fichier:
PDF, 457 KB
english, 2011