
In-situ Study on Effects of Annealing Temperature and Mo Interlayer on Stress Relaxation Behaviors of Pure Al Films on Glass Substrates
Park, Young-Bae, Hwang, Soo-Jung, Lee, Yong-Duk, Jung, Ja-Young, Joo, Young-ChangVolume:
924
Langue:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0924-Z03-12
Date:
January, 2006
Fichier:
PDF, 246 KB
english, 2006