Annealing effect on the metal gate effective work function modulation for the Al/TiN/SiO2/p-Si structure
Xiao-Rong Wang, Yu-Long Jiang, Qi Xie, Christophe Detavernier, Guo-Ping Ru, Xin-Ping Qu, Bing-Zong LiVolume:
88
Année:
2011
Langue:
english
Pages:
5
DOI:
10.1016/j.mee.2010.06.029
Fichier:
PDF, 1.19 MB
english, 2011