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A single layer negative tone lift-off photo resist for patterning a magnetron sputtered Ti/Pt/Au contact system and for solder bumps
A. Voigt, M. Heinrich, K. Hauck, R. Mientus, G. Gruetzner, M. Töpper, O. EhrmannVolume:
78-79
Année:
2005
Langue:
english
Pages:
6
DOI:
10.1016/j.mee.2004.12.064
Fichier:
PDF, 317 KB
english, 2005