[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Low-Temperature Heteroepitaxial Growth of 3C-SiC(111) on Si(110) Substrate Using Monomethylsilane
Konno, Atsushi, Narita, Yuzuru, Itoh, Takashi, Yasui, Kanji, Nakzawa, Hideki, Endoh, Tetsuo, Suemitsu, MakiVolume:
3
Année:
2006
Langue:
english
DOI:
10.1149/1.2357236
Fichier:
PDF, 198 KB
english, 2006