[ECS 208th ECS Meeting - Los Angeles, California (October 16-October 21, 2005)] ECS Transactions - Impact of Al, Ni, and TiN Metal Gates On ZrO2-MOS Capacitors
Abermann, Stephan M., Efavi, Joseph, Lugstein, Alois, Auer, Erwin, Gottlob, Heiner, Schmidt, Mathias, Lemme, Max, Bertagnolli, EmmerichVolume:
1
Année:
2006
Langue:
english
DOI:
10.1149/1.2209300
Fichier:
PDF, 396 KB
english, 2006