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Strain-Induced Electrical Properties of Lead Zirconate Titanate Thin Films on a Si wafer with Controlled Oxide Electrode Structure
Ohno, Tomoya, Ishiduka, Masaaki, Arai, Takashi, Yanagida, Hiroaki, Matsuda, Takeshi, Sakamoto, Naonori, Wakiya, Naoki, Suzuki, HisaoVolume:
51
Langue:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.51.09la13
Date:
September, 2012
Fichier:
PDF, 720 KB
english, 2012