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Extraction Method for the Residual Stress in Multilayer Microplates Under Large Deflection Based on Static Deflection Analysis
Changizi, Amin, Stiharu, Ion, Olbrechts, Benoit, Raskin, Jean-PierreVolume:
24
Langue:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2015.2388532
Date:
August, 2015
Fichier:
PDF, 3.11 MB
english, 2015