Maskless Ultraviolet Projection Lithography with a Biorepelling Monomolecular Resist
Jeyachandran, Y. L., Meyerbröker, Nikolaus, Terfort, Andreas, Zharnikov, MichaelVolume:
119
Langue:
english
Journal:
The Journal of Physical Chemistry C
DOI:
10.1021/jp510809a
Date:
January, 2015
Fichier:
PDF, 5.49 MB
english, 2015