Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2015 / 04 Vol. 348
Proton beam lithography in negative tone liquid phase PDMS polymer resist
Huszank, Robert, Rajta, István, Cserháti, CsabaVolume:
348
Langue:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2014.12.053
Date:
April, 2015
Fichier:
PDF, 1.39 MB
english, 2015