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A lateral field excited ZnO film bulk acoustic wave sensor working in viscous environments
Chen, Da, Wang, Jingjing, Xu, Yan, Li, Dehua, Zhang, Liuyin, Liu, WeihuiVolume:
23
Langue:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/9/095032
Date:
September, 2013
Fichier:
PDF, 1.03 MB
english, 2013