The formation and study of sensor thin layers based on zirconium and rare earth metal (Ce, Y, and Tb) oxides and the preparation of metal-oxide-semiconductor structures based on them
Arsent’ev, M. Yu., Kalinina, M. V., Tikhonov, P. A., Morozova, L. V., Egorova, T. L., Shilova, O. A.Volume:
40
Langue:
english
Journal:
Glass Physics and Chemistry
DOI:
10.1134/S1087659614060029
Date:
November, 2014
Fichier:
PDF, 254 KB
english, 2014
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