Epitaxial lateral overgrowth of GaN on sapphire substrates using in-situ carbonized photoresist mask
Sang-il Kim, Bumjoon Kim, Samseok Jang, A-young Kim, Jihun Park, Dongjin ByunVolume:
326
Année:
2011
Langue:
english
Pages:
5
DOI:
10.1016/j.jcrysgro.2011.01.097
Fichier:
PDF, 791 KB
english, 2011