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[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Trapping in 1nm EOT high-k / MG
Zahid, Mohammed B, Pantisano, Luigi, Degraeve, Robin, Aoulaiche, M, Trojman, L, Ferain, I, San Andres, E, Shickova, A, O'Connor, R., Groeseneken, Guido, Heyns, Marc M., De Gendt, StefanVolume:
16
Année:
2008
Langue:
english
DOI:
10.1149/1.2981589
Fichier:
PDF, 355 KB
english, 2008