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Microfabrication and Experimental Evaluation of a Rotational Capacitive Micromachined Ultrasonic Transducer
Kuntzman, Michael L., Kim, Donghwan, Hall, Neal A.Volume:
24
Langue:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2014.2332255
Date:
April, 2015
Fichier:
PDF, 5.13 MB
english, 2015