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Deep wet etching of fused silica glass for hollow capillary optical leaky waveguides in microfluidic devices
Grosse, Axel, Grewe, Matthias, Fouckhardt, HenningVolume:
11
Langue:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/11/3/315
Date:
May, 2001
Fichier:
PDF, 224 KB
english, 2001