Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2014 / 07 Vol. 32; Iss. 4
Characterization of surface defects on Be-implanted GaSb
Rahimi, Nassim, Aragon, Andrew A., Shima, Darryl M., Hains, Christopher, Busani, Tito, Lavrova, Olga, Balakrishnan, Ganesh, Lester, Luke F.Volume:
32
Langue:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4886095
Date:
July, 2014
Fichier:
PDF, 3.35 MB
english, 2014