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[IEEE IEEE 2005 International Interconnect Technology Conference - Burlingame, CA, USA (6-8 June 2005)] Proceedings of the IEEE 2005 International Interconnect Technology Conference, 2005. - BEOL process integration with Cu/SiCOH (k=2.8) low-k interconnects at 65 nm groundrules
Fukasawa, M., Lane, S., Angyal, M., Chanda, K., Chen, F., Christiansen, C., Fitzsimmons, J., Gill, J., Ida, K., Inoue, K., Kumar, K., Li, B., McLaughlin, P., Melville, I., Minami, M., Nguyen, S., PennAnnée:
2005
Langue:
english
DOI:
10.1109/iitc.2005.1499904
Fichier:
PDF, 522 KB
english, 2005