
[IEEE 2011 IEEE Sensors - Limerick, Ireland (2011.10.28-2011.10.31)] 2011 IEEE SENSORS Proceedings - Noise considerations on hybrid optical MEMS displacement sensors
Hortschitz, Wilfried, Kohl, Franz, Sachse, Matthias, Stifter, Michael, Sauter, Thilo, Steiner, Harald, Schalko, Johannes, Jachimowicz, Artur, Keplinger, FranzAnnée:
2011
Langue:
english
DOI:
10.1109/icsens.2011.6127083
Fichier:
PDF, 1.15 MB
english, 2011