Nanopatterning of silicon with use of self-organized porous alumina and colloidal crystals as mask
Sachiko Ono, Akihiko Oide, Hidetaka AsohVolume:
52
Année:
2007
Langue:
english
Pages:
7
DOI:
10.1016/j.electacta.2006.08.063
Fichier:
PDF, 2.01 MB
english, 2007