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[IEEE 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS) - Sorrento, Italy (2009.01.25-2009.01.29)] 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems - Lever-Based CMOS-MEMS Probes for Reconfigurable RF IC's
Liu, J., Noman, M., Bain, J.A., Schlesinger, T.E., Fedder, G.K.Année:
2009
Langue:
english
DOI:
10.1109/memsys.2009.4805582
Fichier:
PDF, 9.67 MB
english, 2009