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Influence of the deposition parameters controlled by OES on PZT thin film properties deposited by RF magnetron sputtering
Ayguavives, F., Ea-Kim, B., Agius, B.Volume:
225
Langue:
english
Journal:
Ferroelectrics
DOI:
10.1080/00150199908009130
Date:
March, 1999
Fichier:
PDF, 344 KB
english, 1999