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[IEEE 2013 IEEE International Conference of Electron Devices and Solid-State Circuits (EDSSC) - Hong Kong, Hong Kong (2013.06.3-2013.06.5)] 2013 IEEE International Conference of Electron Devices and Solid-state Circuits - High-quality HfSiON gate dielectric and its application in a gate-last NMOSFET fabrication
Xu, Gaobo, Xu, Qiuxia, Yin, Huaxiang, Huajie Zhou,, Yang, Tao, Jiebin Niu,, Meng, Lingkuan, Xiaobin He,, Guilei Wang,, Jiahan Yu,, Dahai Wang,, Li, Junfeng, Jiang Yan,, Zhao, Chao, Chen, DapengAnnée:
2013
Langue:
english
DOI:
10.1109/edssc.2013.6628205
Fichier:
PDF, 400 KB
english, 2013