[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Design, fabrication and characterization of low-voltage piezoelectric two-axis gimbal-less microscanners
Gu-Stoppel, S., Janes, J., Quenzer, H. J., Hofmann, U., Kaden, D., Wagner, B., Benecke, W.Année:
2013
Langue:
english
DOI:
10.1109/transducers.2013.6627311
Fichier:
PDF, 2.03 MB
english, 2013
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