Superior Electrostrictive Strain Behavior of Antiferroelectric $({\rm Pb}, {\rm La})({\rm Zr}, {\rm Ti}){\rm O}_{3}$ Thick Film Microcantilevers for MEMS Device Applications
Chou, Xiujian, Guan, Xinfeng, Lv, Yongbo, Geng, Wenping, Liu, Jun, Xue, Chenyang, Zhang, WendongVolume:
34
Langue:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2013.2272211
Date:
September, 2013
Fichier:
PDF, 917 KB
english, 2013
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