[IEEE 2006 IEEE International Symposium on Industrial Electronics - Montreal, Que. (2006.07.9-2006.07.13)] 2006 IEEE International Symposium on Industrial Electronics - Design and Implementation of an Intelligent Manufacturing Execution System for Semiconductor Manufacturing Industry
Chen, Ruey-shun, Tsai, Yung-shun, Chang, Chan-chineAnnée:
2006
Langue:
english
DOI:
10.1109/isie.2006.296085
Fichier:
PDF, 6.56 MB
english, 2006