[IEEE IEEE International Integrated Reliability Workshop - Lake Tahoe, CA, USA (21-24 Oct. 2002)] IEEE International Integrated Reliability Workshop Final Report, 2002. - Intra-metal leakage reliability characteristics for line/via in copper/low-k interconnect structures
Jeung-Woo Kim,, Nam-Hyung Lee,, Hyung-Woo Kim,, Hyun-Soo Kim,, Chae-Bog Rim,Année:
2002
Langue:
english
DOI:
10.1109/irws.2002.1194229
Fichier:
PDF, 334 KB
english, 2002