[IEEE IEEE SOS/SOI Technology Conference - Stateline, NV, USA (3-5 Oct. 1989)] IEEE SOS/SOI Technology Conference - Electrochemical method for defect delineation in thin-film SOI wafers
Guilinger, T.R., Kelly, M.J., Medernach, J.W., Tsao, S.S., Stevenson, J.O., Jones, H.D.T.Année:
1989
Langue:
english
DOI:
10.1109/soi.1989.69782
Fichier:
PDF, 210 KB
english, 1989