Characteristics of high quality tantalum oxide films deposited by photoinduced chemical vapor deposition
Zhang, Jun-Ying, Lim, Boon, Boyd, Ian W., Dusastre, VincentVolume:
73
Année:
1998
Langue:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.121803
Fichier:
PDF, 316 KB
english, 1998