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[IEEE EFTF-2010 24th European Frequency and Time Forum - Noordwijk, Netherlands (2010.04.13-2010.04.16)] EFTF-2010 24th European Frequency and Time Forum - BAW pressure sensor on LiNbO3 membrane lapping
Baron, T., Masson, J., Romand, J.P., Alzuaga, S., Catherinot, L., Chatras, M., Ballandras, S.Année:
2010
DOI:
10.1109/eftf.2010.6533644
Fichier:
PDF, 259 KB
2010