[IEEE 2014 21st International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD) - Kyoto, Japan (2014.7.2-2014.7.4)] 2014 21st International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD) - Effects of etch stop layer deposition conditions on stress stabilities in amorphous In-Ga-Zn-O thin film transistors
Hino, Aya, Tao, Hiroaki, Takanashi, Yasuyuki, Ochi, Mototaka, Goto, Hiroshi, Hayashi, Kazushi, Kugimiya, ToshihiroAnnée:
2014
Langue:
english
DOI:
10.1109/am-fpd.2014.6867151
Fichier:
PDF, 1.20 MB
english, 2014
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