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[IEEE 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Sanya, China (2008.01.6-2008.01.9)] 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Vibration investigation of clamped-clamped microbeam of MEMS capacitive switch under mechanical shock
Xun-Jun He,, Ming-Xin Song,, Qun Wu,, Yue Wang,, Kai Tang,, Jing-Hua Yin,Année:
2008
Langue:
english
DOI:
10.1109/nems.2008.4484430
Fichier:
PDF, 106 KB
english, 2008