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[IEEE 2014 IEEE 64th Electronic Components and Technology Conference (ECTC) - Orlando, FL, USA (2014.5.27-2014.5.30)] 2014 IEEE 64th Electronic Components and Technology Conference (ECTC) - A novel methodology for wafer-specific feed-forward management of backside silicon removal by wafer grinding for optimized through silicon via reveal
Alvanos, Tyson, Garant, John, Iijima, Yu, Indyk, Richard, Rosenthal, Christopher, Sato, Osamu, Sugase, Naoki, Takizawa, Hideo, Wei, FrankAnnée:
2014
Langue:
english
DOI:
10.1109/ectc.2014.6897323
Fichier:
PDF, 1.30 MB
english, 2014