Hydrogen Implantation in III-V Compound Semiconductors and its Redistribution with Annealing
Zavada, John M., Wilson, R.G.Volume:
148-149
Année:
1994
Langue:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.148-149.189
Fichier:
PDF, 1.12 MB
english, 1994