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[Japan Soc. of Appl. Phys Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference - Tokyo, Japan (29-31 Oct. 2003)] Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference - Plasma resistance and behavior of polybenzoxazine polymer
Jem-Kun Chen,, I-Kuang Lin,, Fu-Hsiang Ko,, Feng-Chih Chang,, Kuo-Shen Chen,Année:
2003
Langue:
english
DOI:
10.1109/imnc.2003.1268745
Fichier:
PDF, 105 KB
english, 2003