Homoepitaxial AlN thin films deposited on m-plane ( 11¯00) AlN substrates by metalorganic chemical vapor deposition
Bryan, Isaac, Bryan, Zachary, Bobea, Milena, Hussey, Lindsay, Kirste, Ronny, Collazo, Ramón, Sitar, ZlatkoVolume:
116
Langue:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4897233
Date:
October, 2014
Fichier:
PDF, 1.58 MB
english, 2014