[IEEE 2006 IEEE International Conference on Semiconductor Electronics - Kuala Lumpur, Malaysia (2006.10.29-2006.12.1)] 2006 IEEE International Conference on Semiconductor Electronics - Effect of Self-Weight and Non-Rigidity on the Bending Characteristics of Surface Micromachined MEMS Test Structures
Lee, Hing Wah, Syono, Mohd. IsmahadiAnnée:
2006
Langue:
english
DOI:
10.1109/smelec.2006.381038
Fichier:
PDF, 1.63 MB
english, 2006