Tensile stress evolution during deposition of Volmer–Weber thin films
Seel, Steven C., Thompson, Carl V., Hearne, Sean J., Floro, Jerrold A.Volume:
88
Année:
2000
Langue:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1325379
Fichier:
PDF, 785 KB
english, 2000