Quantitative analysis of one-dimensional dopant profile by electron holography
McCartney, M. R., Gribelyuk, M. A., Li, Jing, Ronsheim, P., McMurray, J. S., Smith, David J.Volume:
80
Année:
2002
Langue:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.1473702
Fichier:
PDF, 588 KB
english, 2002