
[IEEE TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Lyon, France (2007.06.10-2007.06.14)] TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Modeling and Test of Nanostructure Fabricated on 160 nm Thin SOI Wafer for In-Ic Integration
Andreucci, Philippe, Duraffourg, Laurent, Ollier, Eric, Colinet, Eric, Hentz, Sebastien, Fontaine, Herve, Nguyen, Valerie, Delaye, Marie Therese, Grange, Hubert, Renaud, Denis, Robert, PhilippeAnnée:
2007
Langue:
english
DOI:
10.1109/sensor.2007.4300474
Fichier:
PDF, 1.32 MB
english, 2007