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[IEEE 2011 IEEE 61st Electronic Components and Technology Conference (ECTC) - Lake Buena Vista, FL, USA (2011.05.31-2011.06.3)] 2011 IEEE 61st Electronic Components and Technology Conference (ECTC) - A new wafer-level packaging technology for MEMS with hermetic micro-environment
Chanchani, Rajen, Nordquist, Christopher D., Olsson, Roy H., Peterson, Tracy, Shul, Randy, Ahlers, Catalina, Plut, Thomas A., Patrizi, Gary A.Année:
2011
Langue:
english
DOI:
10.1109/ectc.2011.5898725
Fichier:
PDF, 898 KB
english, 2011