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Pressure-measurement errors in a cold-cathode-ionization gauge caused by an external-electron source
Saeki, Hiroshi, Magome, Tamotsu, Shoji, Yoshihiko, Momose, TakashiVolume:
22
Année:
2004
Langue:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1781184
Fichier:
PDF, 817 KB
english, 2004