[IEEE 2008 9th International Conference on Solid-State and Integrated-Circuit Technology (ICSICT) - Beijing, China (2008.10.20-2008.10.23)] 2008 9th International Conference on Solid-State and Integrated-Circuit Technology - Development of a CMOS-compatible electrostatically actuated diaphragm chamber for micropump application
Lee, Hing Wah, Buyong, Muhamad Ramdzan, Syono, Mohd. Ismahadi, Azid, Ishak Hj. Abd.Année:
2008
Langue:
english
DOI:
10.1109/icsict.2008.4735079
Fichier:
PDF, 3.38 MB
english, 2008