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[IEEE 2008 16th International Conference on Advanced Thermal Processing of Semiconductors (RTP) - Las Vegas, NV, USA (2008.09.30-2008.10.3)] 2008 16th IEEE International Conference on Advanced Thermal Processing of Semiconductors - Laser annealing of double implanted layers for IGBT Power Devices
Sabatier, Clement, Rack, Simon, Beseaucele, Herve, Venturini, Julien, Hoffmann, Thomas Y., Rosseel, Erik, Steenbergen, JohnnyAnnée:
2008
Langue:
english
DOI:
10.1109/rtp.2008.4690553
Fichier:
PDF, 2.74 MB
english, 2008