Evaluation of high thermal stability cyclopentadienyl Hf precursors with H2O as a co-reactant for advanced gate logic applications
Consiglio, Steven, Clark, Robert D., Nakamura, Genji, Wajda, Cory S., Leusink, Gert J.Volume:
30
Année:
2012
Langue:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3664106
Fichier:
PDF, 979 KB
english, 2012