Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
1983 Vol. 1; Iss. 3
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Investigation of the chemical bonding of Cr and Ti to silicon nitride
Orent, T. W.Volume:
1
Année:
1983
Langue:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.582660
Fichier:
PDF, 829 KB
english, 1983