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Impact of thermal annealing on deep-level defects in strained-Si∕SiGe heterostructure
Zhang, Renhua, Rozgonyi, George A., Yakimov, Eugene, Yarykin, Nikolai, Seacrist, MikeVolume:
103
Année:
2008
Langue:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2930998
Fichier:
PDF, 688 KB
english, 2008